Invention Grant
- Patent Title: Polishing pad assembly with glass or crystalline window
- Patent Title (中): 带玻璃或结晶窗的抛光垫组件
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Application No.: US12572100Application Date: 2009-10-01
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Publication No.: US07938714B2Publication Date: 2011-05-10
- Inventor: Dominic J. Benvegnu , Jeffrey Drue David , Bogdan Swedek
- Applicant: Dominic J. Benvegnu , Jeffrey Drue David , Bogdan Swedek
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson
- Main IPC: B24B49/12
- IPC: B24B49/12

Abstract:
Methods and apparatus for providing a chemical mechanical polishing pad. The pad includes a polishing layer having a top surface and a bottom surface. The pad includes an aperture having a first opening in the top surface and a second opening in the bottom surface. The top surface is a polishing surface. The pad includes a window that includes a first portion made of soft plastic and a crystalline or glass like second portion. The window is transparent to white light. The window is situated in the aperture so that the first portion plugs the aperture and the second portion is on a bottom side of the first portion, wherein the first portion acts a slurry-tight barrier.
Public/Granted literature
- US20100075582A1 POLISHING PAD ASSEMBLY WITH GLASS OR CRYSTALLINE WINDOW Public/Granted day:2010-03-25
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