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US07938025B2 Array type capacitance sensor 失效
阵列式电容式传感器

Array type capacitance sensor
Abstract:
In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.
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