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US07930664B2 Programmable through silicon via 有权
可编程通过硅通孔

Programmable through silicon via
Abstract:
Through silicon vias (TSVs) in silicon chips are both programmable and non-programmable. The programmable TSVs may employ metal/insulator/metal structures to switch from an open to shorted condition with programming carried out by complementary circuitry on two adjacent chips in a multi-story chip stack.
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