Invention Grant
US07928748B2 Method of locating failure site on semiconductor device under test 有权
定位半导体器件故障现场的方法

Method of locating failure site on semiconductor device under test
Abstract:
In an analysis of a semiconductor device under test (DUT) using a Thermal Induced Voltage Alteration (TIVA) tool, the TIVA is connected to an output of the DUT and the DC component on the output is decoupled from the TIVA. The remaining AC component from the output is analyzed by the TIVA while scanning the DUT with a scanning laser to identify locations on the DUT that produce signal anomalies at the DUT output.
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