Invention Grant
- Patent Title: Micro-fluidic structure
- Patent Title (中): 微流体结构
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Application No.: US12686199Application Date: 2010-01-12
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Publication No.: US07928520B2Publication Date: 2011-04-19
- Inventor: Frank Bryant , Murray Robinson
- Applicant: Frank Bryant , Murray Robinson
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agent David V. Carlson; Lisa K. Jorgenson
- Main IPC: H01L21/465
- IPC: H01L21/465
Abstract:
A microfabricated structure that includes a first layer of material on a substrate, and a second layer of material over the first layer that forms an encapsulated cavity, and a structural support layer added to the second layer. Openings can be formed in the cavity, and the cavities can be layered side by side, vertically stacked with interconnections via the openings, and a combination of both can be used to construct stacked arrays with interconnections throughout.
Public/Granted literature
- US20100109100A1 MICRO-FLUIDIC STRUCTURE Public/Granted day:2010-05-06
Information query
IPC分类:
