Invention Grant
- Patent Title: Phase change memory cell with vacuum spacer
- Patent Title (中): 具有真空间隔器的相变存储器单元
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Application No.: US11409256Application Date: 2006-04-21
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Publication No.: US07928421B2Publication Date: 2011-04-19
- Inventor: Hsiang Lan Lung
- Applicant: Hsiang Lan Lung
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A memory device. The device includes first and second electrode members, in spaced relation on a substrate. A phase change element lies in electrical contact with the first and second electrode elements and spans the space separating them. The phase change element includes two segments, each in contact with one of the electrode elements. The segments are fused together at a location between the two electrodes such that the fused area has a smaller cross-sectional area than does the remainder of the phase change element. The electrodes, the substrate and the phase change element define a chamber containing a vacuum.
Public/Granted literature
- US20070246699A1 Phase change memory cell with vacuum spacer Public/Granted day:2007-10-25
Information query
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