Invention Grant
- Patent Title: Semiconductor device having a recess channel structure and method for manufacturing the same
- Patent Title (中): 具有凹槽结构的半导体器件及其制造方法
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Application No.: US11757328Application Date: 2007-06-01
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Publication No.: US07902552B2Publication Date: 2011-03-08
- Inventor: Woo Kyung Sun
- Applicant: Woo Kyung Sun
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2006-0081278 20060825
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor device includes a semiconductor substrate having an active region comprising a gate area, a bit line contact area and a storage node contact area. A recess is formed in the gate area and the bit line contact area. A gate is formed over the gate area and a portion of an isolation layer adjacent to the gate area. The gate includes a main gate in the gate area and a passing gate over the isolation layer. A first junction area is formed in the storage node contact area of the active region. A second junction area is formed in the bit line contact area of the active region. A first landing plug and a second landing plug are formed over the first junction area and the second junction area, respectively.
Public/Granted literature
- US20080048253A1 SEMICONDUCTOR DEVICE HAVING A RECESS CHANNEL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2008-02-28
Information query
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