Invention Grant
US07884998B2 Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
有权
反射折射显微镜物镜,采用浸没液体用于宽带显微镜
- Patent Title: Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
- Patent Title (中): 反射折射显微镜物镜,采用浸没液体用于宽带显微镜
-
Application No.: US11818448Application Date: 2007-06-14
-
Publication No.: US07884998B2Publication Date: 2011-02-08
- Inventor: J. Joseph Armstrong
- Applicant: J. Joseph Armstrong
- Applicant Address: US CA Milpitas
- Assignee: KLA - Tencor Corporation
- Current Assignee: KLA - Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Smyrski Law Group, A P.C.
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G02B21/04

Abstract:
An objective for imaging specimens is disclosed. The objective receives light energy from a light energy source configured to provide light energy in a wavelength range of approximately 480 to 660 nanometers, employs a Mangin mirror arrangement in conjunction with an immersion liquid to provide a numerical aperture in excess of 1.0 and a field size in excess of 0.05 millimeters, where every element in the objective has a diameter of less than approximately 40 millimeters.
Public/Granted literature
- US20080247036A1 Catadioptric microscope objective employing immersion liquid for use in broad band microscopy Public/Granted day:2008-10-09
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |