Invention Grant
US07884925B2 Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials 有权
用于监测静电卡盘边缘珠材料侵蚀的电气和光学系统和方法

Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
Abstract:
A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to either emit a species capable of being optically monitored or having an electrical resistance value capable of being monitored, or both. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.
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