Invention Grant
- Patent Title: Illumination system for microlithography
- Patent Title (中): 微光刻照明系统
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Application No.: US11860193Application Date: 2007-09-24
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Publication No.: US07884922B2Publication Date: 2011-02-08
- Inventor: Markus Brotsack
- Applicant: Markus Brotsack
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102004034935 20040709
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/42 ; G03B27/54

Abstract:
An illumination system for a microlithography projection exposure apparatus for illuminating an illumination field with the light from an assigned light source includes a pupil shaping unit for receiving light from the assigned light source and for generating a predeterminable basic light distribution in a pupil plane of the illumination system, and a transmission filter assigned to the pupil shaping unit and having at least one array of individually drivable individual elements for the spatially resolving transmission filtering of the light impinging on the transmission filter in or in proximity to a pupil plane of the illumination system. The transmission filter generates a predetermined correction of the basic light distribution. An illumination system of this type can generate a multiplicity of location-dependent intensity distributions in a pupil plane of the illumination system, and ensure a high transmittance.
Public/Granted literature
- US20080013066A1 ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY Public/Granted day:2008-01-17
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