Invention Grant
US07884417B2 Nonvolatile semiconductor storage device, and method for controlling nonvolatile semiconductor storage device
有权
非易失性半导体存储装置以及非易失性半导体存储装置的控制方法
- Patent Title: Nonvolatile semiconductor storage device, and method for controlling nonvolatile semiconductor storage device
- Patent Title (中): 非易失性半导体存储装置以及非易失性半导体存储装置的控制方法
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Application No.: US12244307Application Date: 2008-10-02
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Publication No.: US07884417B2Publication Date: 2011-02-08
- Inventor: Makoto Mizukami , Fumitaka Arai
- Applicant: Makoto Mizukami , Fumitaka Arai
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-259827 20071003
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to an aspect of the present invention, there is provided, a nonvolatile semiconductor storage device including: a substrate; a stacked portion that includes a plurality of conductor layers and a plurality of insulation layers alternately stacked on the substrate, at least one layer of the plurality of conductor layers and the plurality of insulation layers forming a marker layer; a charge accumulation film that is formed on an inner surface of a memory plug hole that is formed in the stacked portion from a top surface to a bottom surface thereof; and a semiconductor pillar that is formed inside the memory plug hole through the charge accumulation film.
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