Invention Grant
- Patent Title: Method for production of MRAM elements
- Patent Title (中): 生产MRAM元件的方法
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Application No.: US12323998Application Date: 2008-11-26
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Publication No.: US07884405B2Publication Date: 2011-02-08
- Inventor: Joel A. Drewes
- Applicant: Joel A. Drewes
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dickstein Shapiro LLP
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Magneto-resistive random access memory elements include a ferromagnetic layer having uniaxial anisotropy provided by elongate structures formed in the ferromagnetic film. The magnetic dipole aligns with the long axis of each structure. The structures can be formed in a variety of ways. For example, the ferromagnetic film can be applied to a seed layer having a textured surface. Alternatively, the ferromagnetic film can be stressed to generate the textured structure. Chemical mechanical polishing also can be used to generated the structures.
Public/Granted literature
- US20090080240A1 METHOD FOR PRODUCTION OF MRAM ELEMENTS Public/Granted day:2009-03-26
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