Invention Grant
- Patent Title: Magnetic tunnel junction device and memory device including the same
- Patent Title (中): 磁隧道结装置及包括其的存储装置
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Application No.: US10591947Application Date: 2005-03-10
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Publication No.: US07884403B2Publication Date: 2011-02-08
- Inventor: Shinji Yuasa
- Applicant: Shinji Yuasa
- Applicant Address: JP Saitama JP Tokyo
- Assignee: Japan Science and Technology Agency,National Institute of Advanced Industrial Science and Technology
- Current Assignee: Japan Science and Technology Agency,National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP Saitama JP Tokyo
- Agency: Stites & Harbison, PLLC
- Agent Juan Carlos A. Marquez, Esq.
- Priority: JP2004-071186 20040312; JP2004-313350 20041028
- International Application: PCT/JP2005/004720 WO 20050310
- International Announcement: WO2005/088745 WO 20050922
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C11/14

Abstract:
The output voltage of an MRAM is increased by means of an Fe(001)/MgO(001)/Fe(001) MTJ device, which is formed by microfabrication of a sample prepared by the following steps. A single-crystalline MgO (001) substrate 11 is prepared. An epitaxial Fe(001) lower electrode (a first electrode) 17 with the thickness of 50 nm is grown on a MgO(001) seed layer 15 at room temperature, followed by annealing under ultrahigh vacuum (2×10−8 Pa) and at 350° C. A MgO(001) barrier layer 21 with the thickness of 2 nm is epitaxially formed on the Fe(001) lower electrode (the first electrode) at room temperature, using a MgO electron-beam evaporation. A Fe(001) upper electrode (a second electrode) with the thickness of 10 nm is then formed on the MgO(001) barrier layer 21 at room temperature. This is successively followed by the deposition of a Co layer 21 with the thickness of 10 nm on the Fe(001) upper electrode (the second electrode) 23. The Co layer 21 is provided so as to increase the coercive force of the upper electrode 23 in order to realize an antiparallel magnetization alignment.
Public/Granted literature
- US20070195592A1 Magnetic tunnel junction device and method of manufacturing the same Public/Granted day:2007-08-23
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