Invention Grant
- Patent Title: Phase change memory cell with filled sidewall memory element and method for fabricating the same
- Patent Title (中): 具有填充侧壁存储元件的相变存储单元及其制造方法
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Application No.: US12016842Application Date: 2008-01-18
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Publication No.: US07884343B2Publication Date: 2011-02-08
- Inventor: Hsiang Lan Lung , Chieh-Fang Chen
- Applicant: Hsiang Lan Lung , Chieh-Fang Chen
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L49/00
- IPC: H01L49/00

Abstract:
Memory cells are described along with methods for manufacturing. A memory cell described herein includes a bottom electrode, a top electrode overlying the bottom electrode, a via having a sidewall extending from a bottom electrode to a top electrode, and a memory element electrically coupling the bottom electrode to the top electrode. The memory element has an outer surface contacting a dielectric sidewall spacer that is on the sidewall of the via, and comprises a stem portion on the bottom electrode and a cup portion on the stem portion. A fill material is within an interior defined by an inner surface of the cup portion of the memory element.
Public/Granted literature
- US20080191186A1 PHASE CHANGE MEMORY CELL WITH FILLED SIDEWALL MEMORY ELEMENT AND METHOD FOR FABRICATING THE SAME Public/Granted day:2008-08-14
Information query
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