Invention Grant
US07884343B2 Phase change memory cell with filled sidewall memory element and method for fabricating the same 有权
具有填充侧壁存储元件的相变存储单元及其制造方法

Phase change memory cell with filled sidewall memory element and method for fabricating the same
Abstract:
Memory cells are described along with methods for manufacturing. A memory cell described herein includes a bottom electrode, a top electrode overlying the bottom electrode, a via having a sidewall extending from a bottom electrode to a top electrode, and a memory element electrically coupling the bottom electrode to the top electrode. The memory element has an outer surface contacting a dielectric sidewall spacer that is on the sidewall of the via, and comprises a stem portion on the bottom electrode and a cup portion on the stem portion. A fill material is within an interior defined by an inner surface of the cup portion of the memory element.
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