Invention Grant
US07884328B2 Microbolometer with improved mechanical stability and method of manufacturing the same
失效
具有改善机械稳定性的微热辐射计及其制造方法
- Patent Title: Microbolometer with improved mechanical stability and method of manufacturing the same
- Patent Title (中): 具有改善机械稳定性的微热辐射计及其制造方法
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Application No.: US12181871Application Date: 2008-07-29
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Publication No.: US07884328B2Publication Date: 2011-02-08
- Inventor: Seong Mok Cho , Ho Jun Ryu , Woo Seok Yang , Sang Hoon Cheon , Byoung Gon Yu , Chang Auck Choi
- Applicant: Seong Mok Cho , Ho Jun Ryu , Woo Seok Yang , Sang Hoon Cheon , Byoung Gon Yu , Chang Auck Choi
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2007-0130698 20071214
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
Provided are a microbolometer having a cantilever structure and a method of manufacturing the same, and more particularly, a microbolometer having a three-dimensional cantilever structure, which is improved from a conventional two-dimensional cantilever structure, and a method of manufacturing the same. The method includes providing a substrate including a read-out integrated circuit and a reflective layer for forming an absorption structure, forming a sacrificial layer on the substrate, forming a cantilever structure having an uneven cross-section in the sacrificial layer, forming a sensor part isolated from the substrate by the cantilever structure, and removing the sacrificial layer.
Public/Granted literature
- US20090152466A1 MICROBOLOMETER WITH IMPROVED MECHANICAL STABILITY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-06-18
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