Invention Grant
US07884302B2 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece 失效
等离子体处理设备受磁场影响,用于加工连续材料或工件

  • Patent Title: Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece
  • Patent Title (中): 等离子体处理设备受磁场影响,用于加工连续材料或工件
  • Application No.: US10545549
    Application Date: 2004-02-09
  • Publication No.: US07884302B2
    Publication Date: 2011-02-08
  • Inventor: Peter ZigerHelmut JāgerChristian Neureiter
  • Applicant: Peter ZigerHelmut JāgerChristian Neureiter
  • Applicant Address: AT Graz
  • Assignee: Peter Ziger
  • Current Assignee: Peter Ziger
  • Current Assignee Address: AT Graz
  • Agency: Merchant & Gould P.C.
  • Priority: ATA208/2003 20030212; ATA128/2004 20040130
  • International Application: PCT/AT2004/000043 WO 20040209
  • International Announcement: WO2004/073009 WO 20040826
  • Main IPC: B23K9/00
  • IPC: B23K9/00 B01J19/08
Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece
Abstract:
An installation for the plasma processing of a continuous material (1) includes an evacuatable discharge chamber (3a, 3b) and a device for setting a gas atmosphere in the discharge chamber (3a, 3b). The device for setting a gas atmosphere includes a prechamber system (10, 11, 12) and a postchamber system (2), with sluice openings between the chambers (2, 3a, 3b, 10, 11, 12). The continuous material (1) is guided with low friction through the prechamber system (10, 11, 12) and the postchamber system (2). The device for setting a gas atmosphere includes a recovery system wherein gas can be recirculated from a postchamber (2a . . . 2k) into a prechamber (10, 11, 12) and/or postchamber (2a . . . 2k) having a higher pressure level so that processing is effected in a gas-saving manner.
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