Invention Grant
- Patent Title: Method for manufacturing thin film transistor and method for manufacturing display device
- Patent Title (中): 薄膜晶体管的制造方法及显示装置的制造方法
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Application No.: US12397880Application Date: 2009-03-04
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Publication No.: US07883943B2Publication Date: 2011-02-08
- Inventor: Hidekazu Miyairi , Takafumi Mizoguchi
- Applicant: Hidekazu Miyairi , Takafumi Mizoguchi
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2008-061680 20080311
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
A method for manufacturing a thin film transistor and a display device using a small number of masks is provided. A conductive film is formed, a thin-film stack body having a pattern is formed over the conductive film, an opening portion is formed in the thin-film stack body so as to reach the conductive film, a gate electrode layer is formed by processing the conductive film using side-etching, and an insulating layer, a semiconductor layer, and a source and drain electrode layer are formed over the gate electrode layer, whereby a thin film transistor is manufactured. By provision of the opening portion, controllability of etching is improved.
Public/Granted literature
- US20090233389A1 METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING DISPLAY DEVICE Public/Granted day:2009-09-17
Information query
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