Invention Grant
- Patent Title: Method for manufacturing image sensor
- Patent Title (中): 图像传感器制造方法
-
Application No.: US12344448Application Date: 2008-12-26
-
Publication No.: US07883923B2Publication Date: 2011-02-08
- Inventor: Joon-Ku Yoon
- Applicant: Joon-Ku Yoon
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2007-0139446 20071227
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Embodiments relate to an image sensor and a method for manufacturing an image sensor. According to embodiments, a method may include forming a semiconductor substrate including a pixel part and a peripheral part, forming an interlayer dielectric film including a metal wire on and/or over the semiconductor substrate, forming photo diode patterns on and/or over the interlayer dielectric film and connected to the metal wire in the pixel part, forming a device isolation dielectric layer on and/or over the interlayer dielectric film including the photo diode patterns, forming a first via hole on and/or over the device isolation dielectric layer to partially expose the photo diode patterns, and forming a second via hole on and/or over the device isolation dielectric layer to expose the metal wire in the peripheral part. According to embodiments, vertical integration of transistor circuitry and a photo diode may be achieved.
Public/Granted literature
- US20090166775A1 METHOD FOR MANUFACTURING IMAGE SENSOR Public/Granted day:2009-07-02
Information query
IPC分类: