Invention Grant
US07880155B2 Substrate alignment apparatus comprising a controller to measure alignment during transport
有权
基板对准装置，包括控制器，用于测量运输过程中的对准
- Patent Title: Substrate alignment apparatus comprising a controller to measure alignment during transport
- Patent Title (中): 基板对准装置，包括控制器，用于测量运输过程中的对准
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Application No.: US11453395Application Date: 2006-06-15
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Publication No.: US07880155B2Publication Date: 2011-02-01
- Inventor: Alexander G. Krupyshev , Sergei E. Syssoev
- Applicant: Alexander G. Krupyshev , Sergei E. Syssoev
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Main IPC: G01N21/86
- IPC: G01N21/86 ; G01V8/00
Abstract:
A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.
Public/Granted literature
- US20070290150A1 Substrate alignment apparatus Public/Granted day:2007-12-20
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