Invention Grant
US07880144B2 Liquid medium for preventing charge-up in electron microscope and method of observing sample using the same
有权
用于防止电子显微镜充电的液体介质及使用其的观察样品的方法
- Patent Title: Liquid medium for preventing charge-up in electron microscope and method of observing sample using the same
- Patent Title (中): 用于防止电子显微镜充电的液体介质及使用其的观察样品的方法
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Application No.: US12223012Application Date: 2007-01-19
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Publication No.: US07880144B2Publication Date: 2011-02-01
- Inventor: Susumu Kuwabata , Tsukasa Torimoto
- Applicant: Susumu Kuwabata , Tsukasa Torimoto
- Applicant Address: JP Osaka JP Osaka JP Tokyo
- Assignee: Juridical Foundation Osaka Industrial Promotion Organization c/o Mydome Osaka,Osaka University,Hitachi High-Technologies Corporation
- Current Assignee: Juridical Foundation Osaka Industrial Promotion Organization c/o Mydome Osaka,Osaka University,Hitachi High-Technologies Corporation
- Current Assignee Address: JP Osaka JP Osaka JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-012597 20060120
- International Application: PCT/JP2007/050816 WO 20070119
- International Announcement: WO2007/083756 WO 20070726
- Main IPC: H01J37/26
- IPC: H01J37/26 ; G21K5/08

Abstract:
An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of observing a real shape or the like of a sample with a SEM, a TEM or the like. For the purpose of achieving the above-described object, the present invention uses an electrical conductivity-imparting liquid medium, for use in a microscope, which includes an ionic liquid as an essential component thereof and is impregnated into the entirety of a SEM or TEM sample or applied to the observation surface of a SEM or TEM sample to impart electrical conductivity at least to the observation surface of the sample. According to the present invention, the charge built up on the sample surface can be released simply by impregnating or coating the sample with the ionic liquid, and hence the problem of charge-up can be easily solved. Further, even when a sample impregnated or coated with the ionic liquid is placed under vacuum, the ionic liquid is not evaporated from the sample, and hence a biological sample can be observed as it is in an original shape.
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