Invention Grant
- Patent Title: Test system and failure parsing method thereof
- Patent Title (中): 测试系统及其故障解析方法
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Application No.: US12110198Application Date: 2008-04-25
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Publication No.: US07865325B2Publication Date: 2011-01-04
- Inventor: Jong-Hyun Lee , Soo-Yong Lee
- Applicant: Jong-Hyun Lee , Soo-Yong Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2007-0041422 20070427
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A test system and a failure parsing method. The test system may comprise a cell array including defective cells formed according to various failure causes, a test apparatus configured to measure electric characteristics from the defective cells and make the measured electric characteristics numerical, and a database apparatus configured to store the numerical electric characteristics. The failure parsing method may include forming defective cells to have at least one failure cause, measuring electric characteristics of each of the defective cells, storing the measured electric characteristics of each of the defective cells in a database, and judging failure causes of a failed chip of a semiconductor wafer based on the database.
Public/Granted literature
- US20080270050A1 TEST SYSTEM AND FAILURE PARSING METHOD THEREOF Public/Granted day:2008-10-30
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