Invention Grant
US07864392B2 Microscanner and optical equipment with the same 有权
微机和光学设备一样

Microscanner and optical equipment with the same
Abstract:
An optical scanner including a mirror part for reflecting light, a main axis part for supporting the mirror part in a pivotable manner, and a deformable holding part for holding the main axis part. A torsion bar for converting a deformation of the holding part itself into a deformation in torsion is disposed adjacent to the main axis part and is formed in at least one of the holding part and the mirror part. The deformation in torsion generated in the torsion bar makes the mirror part tilt.
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