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US07864332B2 Differential-phase interferometric system 失效
差分相干系统

  • Patent Title: Differential-phase interferometric system
  • Patent Title (中): 差分相干系统
  • Application No.: US12157777
    Application Date: 2008-06-12
  • Publication No.: US07864332B2
    Publication Date: 2011-01-04
  • Inventor: Chien Chou
  • Applicant: Chien Chou
  • Applicant Address: TW Peitou, Taipei
  • Assignee: Chien Chou
  • Current Assignee: Chien Chou
  • Current Assignee Address: TW Peitou, Taipei
  • Main IPC: G01B9/02
  • IPC: G01B9/02
Differential-phase interferometric system
Abstract:
A differential-phase interferometric system includes a polarized heterodyne interferometer for generating reference and signal beam that travel along reference and signal channels, respectively. The signal beam is directed to a specimen and contains measured information of the specimen. The interferometer further generates a first electrical signal output corresponding to first linear polarized waves of the reference and signal beams, and a second electrical signal output corresponding to second linear polarized waves of the reference and signal beams. A differential amplifier receives the first and second electrical signal outputs, and generates a differential signal output therefrom. A data acquisition unit is used to measure amplitudes of the first and second electrical signal outputs and the differential signal output. A computing unit computes the amplitudes measured by the data acquisition unit to determine a phase difference between the electrical signal outputs, which corresponds to the measured information of the specimen.
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