Invention Grant
- Patent Title: Differential-phase interferometric system
- Patent Title (中): 差分相干系统
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Application No.: US12157777Application Date: 2008-06-12
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Publication No.: US07864332B2Publication Date: 2011-01-04
- Inventor: Chien Chou
- Applicant: Chien Chou
- Applicant Address: TW Peitou, Taipei
- Assignee: Chien Chou
- Current Assignee: Chien Chou
- Current Assignee Address: TW Peitou, Taipei
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A differential-phase interferometric system includes a polarized heterodyne interferometer for generating reference and signal beam that travel along reference and signal channels, respectively. The signal beam is directed to a specimen and contains measured information of the specimen. The interferometer further generates a first electrical signal output corresponding to first linear polarized waves of the reference and signal beams, and a second electrical signal output corresponding to second linear polarized waves of the reference and signal beams. A differential amplifier receives the first and second electrical signal outputs, and generates a differential signal output therefrom. A data acquisition unit is used to measure amplitudes of the first and second electrical signal outputs and the differential signal output. A computing unit computes the amplitudes measured by the data acquisition unit to determine a phase difference between the electrical signal outputs, which corresponds to the measured information of the specimen.
Public/Granted literature
- US20080309946A1 Differential-phase interferometric system Public/Granted day:2008-12-18
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