Invention Grant
US07864308B2 Position detection method, exposure apparatus, and device manufacturing method 有权
位置检测方法,曝光装置和装置制造方法

Position detection method, exposure apparatus, and device manufacturing method
Abstract:
This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In this method, the relationship between the position of the target object in the optical-axis direction of the optical system and the evaluation value of the signal output from the image sensor is measured, and the position of a peak close to a reference focus position, which is selected if the evaluation value has a plurality of peaks in the measured relationship, is detected as the focus position.
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