Invention Grant
US07863741B2 Semiconductor chip and manufacturing method thereof 有权
半导体芯片及其制造方法

Semiconductor chip and manufacturing method thereof
Abstract:
A semiconductor chip formed with a bump such that the bump corresponds to a pad electrode. The pad electrode is covered with a nickel layer. The bump has an indium layer and an intermediate metal compound layer disposed between the indium layer and the nickel layer, and the intermediate metal compound layer is formed by alloying the indium layer and a copper layer containing copper atoms of not less than 0.5 atomic percent and not more than 5 atomic percent with respect to the indium atoms in the indium layer.
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