Invention Grant
US07863698B2 Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices
有权
用于垂直集成微加工设备的性能提升双面MEMS锚定设计
- Patent Title: Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices
- Patent Title (中): 用于垂直集成微加工设备的性能提升双面MEMS锚定设计
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Application No.: US12418554Application Date: 2009-04-03
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Publication No.: US07863698B2Publication Date: 2011-01-04
- Inventor: Joseph Seeger , Goksen G. Yaralioglu , Bruno Borovic , Alexander Castro
- Applicant: Joseph Seeger , Goksen G. Yaralioglu , Bruno Borovic , Alexander Castro
- Applicant Address: US CA Sunnyvale
- Assignee: Invensense, Inc.
- Current Assignee: Invensense, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Sawyer Law Group, P.C.
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.
Public/Granted literature
- US20100252897A1 PERFORMANCE-ENHANCING TWO-SIDED MEMS ANCHOR DESIGN FOR VERTICALLY INTEGRATED MICROMACHINED DEVICES Public/Granted day:2010-10-07
Information query
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