Invention Grant
- Patent Title: Micromechanical diaphragm sensor having a double diaphragm
- Patent Title (中): 具有双隔膜的微机械隔膜传感器
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Application No.: US11884563Application Date: 2005-12-21
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Publication No.: US07863072B2Publication Date: 2011-01-04
- Inventor: Matthias Illing , Heribert Weber , Christoph Schelling , Heiko Stahl , Stefan Weiss
- Applicant: Matthias Illing , Heribert Weber , Christoph Schelling , Heiko Stahl , Stefan Weiss
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005007540 20050218
- International Application: PCT/EP2005/057023 WO 20051221
- International Announcement: WO2006/087045 WO 20060824
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as well as a second diaphragm, which is disposed essentially on top of the first diaphragm. Furthermore, the micromechanical diaphragm sensor has a first cavity and a second cavity, which is essentially disposed above the first cavity.
Public/Granted literature
- US20090206422A1 Micromechanical diaphragm sensor having a double diaphragm Public/Granted day:2009-08-20
Information query
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