Invention Grant
- Patent Title: Controlling effusion cell of deposition system
- Patent Title (中): 控制沉积系统的积液细胞
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Application No.: US11325558Application Date: 2006-01-05
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Publication No.: US07862855B2Publication Date: 2011-01-04
- Inventor: Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
- Applicant: Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
- Applicant Address: KR Giheung-Gu, Yongin, Gyunggi-Do
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyunggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0001084 20050106; KR10-2005-0001085 20050106
- Main IPC: C23C16/448
- IPC: C23C16/448

Abstract:
In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.
Public/Granted literature
- US20060147628A1 Controlling effusion cell of deposition system Public/Granted day:2006-07-06
Information query
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