Invention Grant
US07862761B2 Pattern forming method and pattern forming apparatus 有权
图案形成方法和图案形成装置

Pattern forming method and pattern forming apparatus
Abstract:
A pattern forming method for forming a pattern on a pattern forming material on a substrate by using an imprint pattern provided to a mold is constituted by preparing a substrate having thereon a pattern forming area, disposing the pattern forming material placed in an uncured state in the pattern forming area in a dispersion state at a plurality of positions at different intervals, and curing the pattern forming material in a state in which the pattern forming material is deformed in a shape corresponding to a shape of the imprint pattern provided to the mold.
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