Invention Grant
- Patent Title: Pattern forming method and pattern forming apparatus
- Patent Title (中): 图案形成方法和图案形成装置
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Application No.: US11753106Application Date: 2007-05-24
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Publication No.: US07862761B2Publication Date: 2011-01-04
- Inventor: Shingo Okushima , Junichi Seki
- Applicant: Shingo Okushima , Junichi Seki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-151009 20060531
- Main IPC: B29C43/02
- IPC: B29C43/02 ; B29C71/00

Abstract:
A pattern forming method for forming a pattern on a pattern forming material on a substrate by using an imprint pattern provided to a mold is constituted by preparing a substrate having thereon a pattern forming area, disposing the pattern forming material placed in an uncured state in the pattern forming area in a dispersion state at a plurality of positions at different intervals, and curing the pattern forming material in a state in which the pattern forming material is deformed in a shape corresponding to a shape of the imprint pattern provided to the mold.
Public/Granted literature
- US20070278712A1 PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS Public/Granted day:2007-12-06
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