Invention Grant
US07862316B2 Foamed mechanical planarization pads made with supercritical fluid
失效
用超临界流体制成的发泡机械平面化垫
- Patent Title: Foamed mechanical planarization pads made with supercritical fluid
- Patent Title (中): 用超临界流体制成的发泡机械平面化垫
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Application No.: US11650047Application Date: 2007-01-04
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Publication No.: US07862316B2Publication Date: 2011-01-04
- Inventor: Stephen J. Kramer
- Applicant: Stephen J. Kramer
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S
- Main IPC: B29C44/36
- IPC: B29C44/36
Abstract:
Foamed thermoplastic polymeric mechanical planarization polishing pads (“MP pads”) made with supercritical fluids are presented. A supercritical fluid foaming agent is dissolved in a thermoplastic polymer. A rapid change in the solubility and volume of the supercritical fluid foaming agent in the thermoplastic polymer results in foaming of the thermoplastic polymer. Foamed thermoplastic polymeric MP pads are advantageously both significantly and uniformly porous.
Public/Granted literature
- US20070122511A1 Formed mechanical planarization pads made with supercritical fluid Public/Granted day:2007-05-31
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