Invention Grant
- Patent Title: Method for measuring rotation angle of bonded wafer
- Patent Title (中): 测量接合晶片旋转角度的方法
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Application No.: US12452070Application Date: 2008-07-03
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Publication No.: US07861421B2Publication Date: 2011-01-04
- Inventor: Norihiro Kobayashi , Tohru Ishizuka , Nobuhiko Noto
- Applicant: Norihiro Kobayashi , Tohru Ishizuka , Nobuhiko Noto
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-193544 20070725
- International Application: PCT/JP2008/001752 WO 20080703
- International Announcement: WO2009/013857 WO 20090129
- Main IPC: G01B5/24
- IPC: G01B5/24 ; G01B7/30

Abstract:
The present invention provides a method for measuring a rotation angle of a bonded wafer, wherein a base wafer and a bond wafer each having a notch indicative of a crystal orientation formed at an outer edge thereof are bonded to each other at a desired rotation angle by utilizing the notches, a profile of the bond wafer having a reduced film thickness is observed with respect to a bonded wafer manufactured by reducing a film thickness of the bond wafer, a positional direction of the notch of the bond wafer seen from a center of the bonded wafer is calculated by utilizing the profile, an angle formed between the calculated positional direction of the notch of the bond wafer and a positional direction of the notch of the base wafer is calculated, and a rotation angle of the base wafer and the bond wafer is measured. As a result, the method for measuring a rotation angle of a bonded wafer that enables accurately and easily measuring the rotation angle of the notches of the base wafer and the bond wafer in a bonded wafer manufacturing line can be provided.
Public/Granted literature
- US20100132205A1 METHOD FOR MEASURING ROTATION ANGLE OF BONDED WAFER Public/Granted day:2010-06-03
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