Invention Grant
US07848027B2 Objective lens 有权
物镜

Objective lens
Abstract:
An objective lens OL includes, in order from an object, a first lens group G1 having positive refractive power, a second lens group G2 having positive refractive power, a diffractive optical element GD forming a diffractive optical surface D thereon, and a third lens group G3 having negative refractive power. The first lens group G1 includes at least one cemented lens and the most object side surface thereof forms a concave surface facing the object. The second lens group G2 includes at least one cemented lens. The third lens group G3 includes at least one cemented negative lens. In the objective lens OL, a principal ray crosses an optical axis between the second lens group G2 and the third lens group G3, and in the diffractive optical element GD, the diffractive optical surface D is disposed in the vicinity of the position where the principal ray crosses the optical axis.
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