Invention Grant
- Patent Title: MEMS device and optical switch
- Patent Title (中): MEMS器件和光开关
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Application No.: US12500665Application Date: 2009-07-10
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Publication No.: US07847995B2Publication Date: 2010-12-07
- Inventor: Takashi Shimizu , Kazuyuki Mori
- Applicant: Takashi Shimizu , Kazuyuki Mori
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/00 ; G02B6/26

Abstract:
A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.
Public/Granted literature
- US20100134860A1 MEMS DEVICE AND OPTICAL SWITCH Public/Granted day:2010-06-03
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