Invention Grant
- Patent Title: Measuring equipment
- Patent Title (中): 测量设备
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Application No.: US11666078Application Date: 2005-11-01
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Publication No.: US07847931B2Publication Date: 2010-12-07
- Inventor: Naoki Tsumura , Kazushiro Fukushima
- Applicant: Naoki Tsumura , Kazushiro Fukushima
- Applicant Address: JP Otawara-shi JP Tokyo
- Assignee: Tochigi Nikon Corporation,Nikon Corporation
- Current Assignee: Tochigi Nikon Corporation,Nikon Corporation
- Current Assignee Address: JP Otawara-shi JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-325264 20041109
- International Application: PCT/JP2005/020124 WO 20051101
- International Announcement: WO2006/051728 WO 20060518
- Main IPC: G01J3/00
- IPC: G01J3/00

Abstract:
A measuring equipment utilizing terahertz pulse light, includes: a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.
Public/Granted literature
- US20080013071A1 Measuring Equipment Public/Granted day:2008-01-17
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