Invention Grant
- Patent Title: Emergency machine off feature with safety control interface
- Patent Title (中): 紧急停机功能，带安全控制接口
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Application No.: US11854035Application Date: 2007-09-12
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Publication No.: US07847683B2Publication Date: 2010-12-07
- Inventor: Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young
- Applicant: Gregory S. Boettcher , William R. Copeland , Joseph P. DeGeorge , Scott M. Hargash , William T. Petry , Robert R. Young
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Petrokaitis
- Main IPC: G08B1/00
- IPC: G08B1/00 ; G08B29/00 ; G08B21/00 ; H01H47/00 ; H05B3/02
Abstract:
An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
Public/Granted literature
- US20090066502A1 EMERGENCY MACHINE OFF FEATURE WITH SAFETY CONTROL INTERFACE Public/Granted day:2009-03-12
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