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US07847538B2 Testing micromirror devices 有权
测试微镜设备

Testing micromirror devices
Abstract:
An array of individually addressable micromirrors is characterized by sending a driving signal to a pixel group having a fewer number of micromirrors. A response of the micromirrors in the group is measured; and the micromirror array is characterized based upon at least the measured response.
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