Invention Grant
US07847373B2 Fabricating bipolar junction select transistors for semiconductor memories
有权
制造用于半导体存储器的双极结选择晶体管
- Patent Title: Fabricating bipolar junction select transistors for semiconductor memories
- Patent Title (中): 制造用于半导体存储器的双极结选择晶体管
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Application No.: US12341027Application Date: 2008-12-22
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Publication No.: US07847373B2Publication Date: 2010-12-07
- Inventor: Agostino Pirovano , Augusto Benvenuti , Fabio Pellizzer , Giorgio Servalli
- Applicant: Agostino Pirovano , Augusto Benvenuti , Fabio Pellizzer , Giorgio Servalli
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L27/082
- IPC: H01L27/082 ; H01L27/102 ; H01L29/70

Abstract:
A bipolar junction transistor may act as a select device for a semiconductor memory. The bipolar junction transistor may be formed of a stack of base and collector layers. Sets of parallel trenches are formed in a first direction down to the base and in a second direction down to the collector. The trenches may be used to form local enhancement implants into the exposed portion of the base and collector in each trench. As a result of the local enhancement implants, in some embodiments, leakage current may be reduced, active current capability may be higher, gain may be higher, base resistance may be reduced, breakdown voltage may be increased, and parasitic effects with adjacent junctions may be reduced.
Public/Granted literature
- US20100155894A1 Fabricating Bipolar Junction Select Transistors For Semiconductor Memories Public/Granted day:2010-06-24
Information query
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