Invention Grant
- Patent Title: Interferometric measurement of DLC layer on magnetic head
- Patent Title (中): 磁头DLC层的干涉测量
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Application No.: US12009424Application Date: 2008-01-18
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Publication No.: US07808652B2Publication Date: 2010-10-05
- Inventor: Florin Munteanu , Dong Chen , Erik Novak , G. Lawrence Best
- Applicant: Florin Munteanu , Dong Chen , Erik Novak , G. Lawrence Best
- Applicant Address: US AZ Tucson
- Assignee: Veeco Instruments, Inc.
- Current Assignee: Veeco Instruments, Inc.
- Current Assignee Address: US AZ Tucson
- Agent Antonio R. Durando
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.
Public/Granted literature
- US20090185193A1 Interferometric measurement of DLC layer on magnetic head Public/Granted day:2009-07-23
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