Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US11491259Application Date: 2006-07-24
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Publication No.: US07808049B2Publication Date: 2010-10-05
- Inventor: Naoki Kotani
- Applicant: Naoki Kotani
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2005-272455 20050920
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
In a semiconductor device, a transistor in an N-type logic region NL is covered with a tensile stress applying film and a transistor in a P-type logic region PL is covered with a compressive stress applying film. Transistors in a P-type SRAM region PS and an N-type SRAM region NS are covered with an insulating film which applies lower stress than the stresses applied by the above-described two films.
Public/Granted literature
- US20070063286A1 Semiconductor device and method for manufacturing the same Public/Granted day:2007-03-22
Information query
IPC分类: