Invention Grant
- Patent Title: Thin film transistor, display device having thin film transistor, and method for manufacturing the same
- Patent Title (中): 薄膜晶体管,具有薄膜晶体管的显示装置及其制造方法
-
Application No.: US12243097Application Date: 2008-10-01
-
Publication No.: US07808000B2Publication Date: 2010-10-05
- Inventor: Shunpei Yamazaki , Yoshiyuki Kurokawa , Yasuhiro Jinbo , Satoshi Kobayashi , Daisuke Kawae
- Applicant: Shunpei Yamazaki , Yoshiyuki Kurokawa , Yasuhiro Jinbo , Satoshi Kobayashi , Daisuke Kawae
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2007-262738 20071005; JP2007-267075 20071012
- Main IPC: H01L29/10
- IPC: H01L29/10

Abstract:
A thin film transistor with excellent electric characteristics, a display device having the thin film transistor, and a method for manufacturing the thin film transistor and the display device are proposed. The thin film transistor includes a gate insulating film formed over a gate electrode, a microcrystalline semiconductor film formed over the gate insulating film, a buffer layer formed over the microcrystalline semiconductor film, a pair of semiconductor films to which an impurity element imparting one conductivity type is added and which are formed over the buffer layer, and wirings formed over the pair of semiconductor films to which the impurity element imparting one conductivity type is added. A part of the gate insulating film or the entire gate insulating film, and/or a part of the microcrystalline semiconductor or the entire microcrystalline semiconductor includes an impurity element which serves as a donor.
Public/Granted literature
- US20090090916A1 THIN FILM TRANSISTOR, DISPLAY DEVICE HAVING THIN FILM TRANSISTOR, AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-04-09
Information query
IPC分类: