Invention Grant
- Patent Title: Method and system for characterizing porous materials
- Patent Title (中): 表征多孔材料的方法和系统
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Application No.: US11689937Application Date: 2007-03-22
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Publication No.: US07807213B2Publication Date: 2010-10-05
- Inventor: Jianhong Zhu , Dorel Ioan Toma
- Applicant: Jianhong Zhu , Dorel Ioan Toma
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: G01N13/00
- IPC: G01N13/00 ; B01D59/12 ; C23C16/52
Abstract:
A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.
Public/Granted literature
- US20070190232A1 METHOD AND SYSTEM FOR CHARACTERIZING POROUS MATERIALS Public/Granted day:2007-08-16
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