Invention Grant
- Patent Title: Composite mechanical transducers and approaches therefor
- Patent Title (中): 复合机械传感器及其方法
-
Application No.: US11446568Application Date: 2006-06-02
-
Publication No.: US07806586B2Publication Date: 2010-10-05
- Inventor: Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
- Applicant: Renata Melamud , Bongsang Kim , Matt Hopcroft , Saurabh Chandorkar , Manu Agarwal , Thomas W. Kenny
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Crawford Maunu PLLC
- Main IPC: G01K11/22
- IPC: G01K11/22

Abstract:
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
Public/Granted literature
- US20070277620A1 Composite mechanical transducers and approaches therefor Public/Granted day:2007-12-06
Information query