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US07806586B2 Composite mechanical transducers and approaches therefor 有权
复合机械传感器及其方法

Composite mechanical transducers and approaches therefor
Abstract:
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
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