Invention Grant
- Patent Title: Method for measuring the number of fine particles in ultrapure water and method for manufacturing a filtration device for measuring the number of fine particles in ultrapure water
- Patent Title (中): 超纯水中的微粒数量的测定方法及超纯水中的微粒数量的过滤装置的制造方法
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Application No.: US11883305Application Date: 2006-01-18
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Publication No.: US07805983B2Publication Date: 2010-10-05
- Inventor: Mutsuko Endou , Tooru Kusano , Kazunari Akahira , Takashi Ito
- Applicant: Mutsuko Endou , Tooru Kusano , Kazunari Akahira , Takashi Ito
- Applicant Address: JP Atsugi-shi JP Tokyo
- Assignee: Nomura Micro Science Co., Ltd.,Asahi Kasei Chemicals Corp.
- Current Assignee: Nomura Micro Science Co., Ltd.,Asahi Kasei Chemicals Corp.
- Current Assignee Address: JP Atsugi-shi JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2005-023706 20050131; JP2005-036462 20050214; JP2005-058221 20050302; JP2005-336252 20051121
- International Application: PCT/JP2006/300586 WO 20060118
- International Announcement: WO2006/080211 WO 20060803
- Main IPC: G01N30/00
- IPC: G01N30/00 ; B01D33/21
Abstract:
A method for measuring the number of fine particles in ultrapure water includes subjecting the ultrapure water to internal pressure filtration through a hollow fiber membrane having a skin layer capable of trapping the fine particles in the ultrapure water at least on an inner surface thereof, exposing the inner surface of the hollow fiber membrane, and measuring the number of fine particles on the exposed inner surface.
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