Invention Grant
- Patent Title: Multibit electro-mechanical memory device and method of manufacturing the same
- Patent Title (中): 多位机电记忆体装置及其制造方法
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Application No.: US12074645Application Date: 2008-03-05
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Publication No.: US07791936B2Publication Date: 2010-09-07
- Inventor: Ji-Myoung Lee , Min-Sang Kim , Eun-Jung Yun , Sung-Young Lee , In-Hyuk Choi
- Applicant: Ji-Myoung Lee , Min-Sang Kim , Eun-Jung Yun , Sung-Young Lee , In-Hyuk Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2007-0022888 20070308
- Main IPC: G11C11/50
- IPC: G11C11/50

Abstract:
A multibit electro-mechanical memory device and a method of manufacturing the same include a substrate, a bit line on the substrate; a lower word line and a trap site isolated from the bit line, a pad electrode isolated from a sidewall of the trap site and the lower word line and connected to the bit line, a cantilever electrode suspended over a lower void in an upper part of the trap site, and connected to the pad electrode and curved by an electrical field induced by a charge applied to the lower word line, a contact part for concentrating a charge induced from the cantilever electrode thereon in response to the charge applied from the lower word line and the trap site, the contact part protruding from an end part of the cantilever electrode, and an upper word line formed with an upper void above the cantilever electrode.
Public/Granted literature
- US20080219048A1 Multibit electro-mechanical memory device and method of manufacturing the same Public/Granted day:2008-09-11
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