Invention Grant
- Patent Title: Optical assembly
- Patent Title (中): 光学组件
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Application No.: US11814713Application Date: 2006-01-26
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Publication No.: US07791826B2Publication Date: 2010-09-07
- Inventor: Hermann Bieg , Karl-Eugen Aubele , Yim-Bun Patrick Kwan , Stefan Xalter , Martin Schmidt , Saverio Sanvido , Uy-Liem Nguyen
- Applicant: Hermann Bieg , Karl-Eugen Aubele , Yim-Bun Patrick Kwan , Stefan Xalter , Martin Schmidt , Saverio Sanvido , Uy-Liem Nguyen
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102005034235 20050719
- International Application: PCT/EP2006/000684 WO 20060126
- International Announcement: WO2006/079537 WO 20060803
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.
Public/Granted literature
- US20080170303A1 Optical Assembly Public/Granted day:2008-07-17
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |