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US07791815B2 Dielectric coatings for electrowetting applications 有权
用于电润湿应用的电介质涂层

Dielectric coatings for electrowetting applications
Abstract:
A dielectric coating is provided which has both a dielectric constant greater than 2.5 and a hydrophobic surface. The dielectric coating may be provided by plasma enhanced chemical vapor deposition (PECVD) of organosilane, organosiloxane, organosilazane, organometallic, and/or hydrocarbon precursors. Methods are also provided for altering the contact angle of a liquid in contact with the dielectric coating, e.g., for electrowetting applications.
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