Invention Grant
- Patent Title: Characterization of transmission losses in an optical system
- Patent Title (中): 光学系统中传输损耗的表征
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Application No.: US11451599Application Date: 2006-06-13
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Publication No.: US07791724B2Publication Date: 2010-09-07
- Inventor: Arie Jeffrey Den Boef , Wilhelmus Maria Corbeij , Mircea Dusa , Markus Gerardus Martinus Van Kraaij
- Applicant: Arie Jeffrey Den Boef , Wilhelmus Maria Corbeij , Mircea Dusa , Markus Gerardus Martinus Van Kraaij
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
The illumination profile of a radiation beam is initially measured using a CCD detector. A reference mirror is then placed in the focal plane of the high aperture lens and the reflected radiation measured. By comparing the illumination profile and the detected radiation it is possible to determine the transmission losses for S and P polarisation which can then be used in scatterometry modeling.
Public/Granted literature
- US20070296960A1 Method of characterising the transmission losses of an optical system Public/Granted day:2007-12-27
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