Invention Grant
- Patent Title: Planarizing probe card
- Patent Title (中): 平面探针卡
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Application No.: US11953204Application Date: 2007-12-10
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Publication No.: US07791361B2Publication Date: 2010-09-07
- Inventor: Ken Karklin , Raffi Garaedian
- Applicant: Ken Karklin , Raffi Garaedian
- Applicant Address: US CA Baldwin Park
- Assignee: Touchdown Technologies, Inc.
- Current Assignee: Touchdown Technologies, Inc.
- Current Assignee Address: US CA Baldwin Park
- Agent Manuel F. de la Cerra
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A novel planarizing probe card for testing a semiconductor device is presented. The probe card is adapted to come into contact with a probe card mount that is in adjustable contact with the prober. The probe card includes a printed circuit board affixed to a stiffener and a probe head that is in electrical contact with the printed circuit board. The probe head also includes a plurality of probe contactor tips that define a first plane. The stiffener further contains at least two planarizing adjusters that comes into contact with the probe card mount. The adjusters may be actuated to alter the position of first plane. A surface of the semiconductor device under test may define a second plane, and the adjusters may be adjusted to position the first plane to be substantially parallel to the second plane.
Public/Granted literature
- US20090146675A1 PLANARIZING PROBE CARD Public/Granted day:2009-06-11
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