Invention Grant
- Patent Title: Memory cell having a buried phase change region and method for fabricating the same
- Patent Title (中): 具有埋置相变区的存储单元及其制造方法
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Application No.: US12107573Application Date: 2008-04-22
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Publication No.: US07791057B2Publication Date: 2010-09-07
- Inventor: Hsiang-Lan Lung , Chung Hon Lam , Min Yang , Alejandro G. Schrott
- Applicant: Hsiang-Lan Lung , Chung Hon Lam , Min Yang , Alejandro G. Schrott
- Applicant Address: TW Hsinchu US NY Armonk
- Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee: Macronix International Co., Ltd.,International Business Machines Corporation
- Current Assignee Address: TW Hsinchu US NY Armonk
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Kenta Suzue
- Main IPC: H01L29/02
- IPC: H01L29/02

Abstract:
Memory cells are described along with methods for manufacturing. A memory cell as described herein includes a bottom electrode comprising a base portion and a pillar portion on the base portion, the pillar portion having a width less than that of the base portion. A dielectric surrounds the bottom electrode and has a top surface. A memory element is overlying the bottom electrode and includes a recess portion extending from the top surface of the dielectric to contact the pillar portion of the bottom electrode, wherein the recess portion of the memory element has a width substantially equal to the width of the pillar portion of the bottom electrode. A top electrode is on the memory element.
Public/Granted literature
- US20090261313A1 MEMORY CELL HAVING A BURIED PHASE CHANGE REGION AND METHOD FOR FABRICATING THE SAME Public/Granted day:2009-10-22
Information query
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