Invention Grant
- Patent Title: Ion implanting apparatus and method for implanting ions
- Patent Title (中): 离子注入装置和离子注入方法
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Application No.: US11970755Application Date: 2008-01-08
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Publication No.: US07791048B2Publication Date: 2010-09-07
- Inventor: Deok-Hoi Kim , Chung Yi
- Applicant: Deok-Hoi Kim , Chung Yi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0013111 20070208
- Main IPC: G21K5/10
- IPC: G21K5/10

Abstract:
In an ion implanting apparatus and a method for implanting ions are provided. The ion implanting apparatus includes an ion source part, a substrate holding part, a beam current adjusting part, a doping quantity measuring part, and an ion beam control part. The ion source part generates an ion beam. The ion beam is irradiated onto the substrate and the ions are implanted into the substrate. The beam current adjusting part is disposed between the ion source part and the substrate holding part, to adjust a beam current. The doping quantity measuring part is disposed on substantially the same surface as the substrate, to measure ion doping quantity. The ion beam control part is connected to the doping quantity measuring part, to control the ion source part and the beam current adjusting part.
Public/Granted literature
- US20080191154A1 ION IMPLANTING APPARATUS AND METHOD FOR IMPLANTING IONS Public/Granted day:2008-08-14
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